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苏州晶拓半导体科技有限公司

半导体行业-高浓度臭氧水机台

半导体行业强大的臭氧水系统!
Powerful Dissolved Ozone system Designed for Semi-Conductor!
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产品详情

● Multi Chamber DIO3 supply;

● Dissolved Ozone Water concentration:5-100ppm;

● Constant ozone concentration and operating pressure at varying flow rates;

● Dissolved O3 water monitor intergrated;

● Ultra clean for Semiconductor process;  

● Close loop DIO3 concentration controlling system;

● Gas-liquid separation unit intergrated, bubble free ozone water;

● High efficiency ozone contactor;

● SEMI-S2 and CE Certification;

● Application:Cleaning, surface conditioning,Etching


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